Imaging Ellipsometry
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Imaging Ellipsometer. The Enhanced Imaging Ellipsometer combines the features of the Picometer Ellipsometer and the Imaging Ellipsometer in a single instrument. While the Picometer can measure down to 0.1 angstrom thickness change in less than 1 ms, the Imaging Ellipsometer permits a large area to be mapped with a lateral resolution of 3-6 mm. |